Interferential lithography of 1D thin metallic sinusoidal gratings : accurate control of the profile for azimuthal angular dependent plasmonic effects and applications

Nonlinear processes involved in the manufacture of nominally sinusoidal surface relief diffraction gratings generated by interference lithography can introduce distortions into the profile of these surfaces. Such distortions may dramatically affect both the specular reflectivity and diffracted effic...

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Bibliographic Details
Main Authors: Romanato, Filippo, Kang, Husen Kartasasmita, Lee, Kwang Hong, Ruffato, Gianluca, Prasciolu, Mauro, Wong, Chee Cheong
Other Authors: School of Materials Science & Engineering
Format: Article
Language:English
Published: 2010
Subjects:
Online Access:https://hdl.handle.net/10356/79924
http://hdl.handle.net/10220/6205
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Institution: Nanyang Technological University
Language: English
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