Dielectric supported bimetal layer configuration for long-range surface plasmon polariton interference–based subwavelength lithography
Long-range surface plasmon polariton (LRSPP) interference in a dielectric supported bimetal layer configuration is analyzed for nanoscale periodic feature fabrication. The single metal layer in a conventional configuration has been split into a bimetal layer configuration supported by a dielectric l...
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Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
2015
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/81084 http://hdl.handle.net/10220/39118 |
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Institution: | Nanyang Technological University |
Language: | English |