Dielectric supported bimetal layer configuration for long-range surface plasmon polariton interference–based subwavelength lithography

• Main Authors: Prabhathan, Patinharekandy, Murukeshan, Vadakke Matham
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2015
• Subjects: Surface plasmons; Plasmonics; Nanolithography
• Online Access: https://hdl.handle.net/10356/81084; http://hdl.handle.net/10220/39118
• Institution: Nanyang Technological University

Long-range surface plasmon polariton (LRSPP) interference in a dielectric supported bimetal layer configuration is analyzed for nanoscale periodic feature fabrication. The single metal layer in a conventional configuration has been split into a bimetal layer configuration supported by a dielectric l...