Speckle lithography for fabricating Gaussian, quasi-random 2D structures and black silicon structures

• المؤلفون الرئيسيون: Bingi, Jayachandra, Murukeshan, Vadakke Matham
• مؤلفون آخرون: School of Mechanical and Aerospace Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2016
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/81736; http://hdl.handle.net/10220/39669

Laser speckle pattern is a granular structure formed due to random coherent wavelet interference and generally considered as noise in optical systems including photolithography. Contrary to this, in this paper, we use the speckle pattern to generate predictable and controlled Gaussian random structu...