Decoupling contact and mirror: an effective way to improve the reflector for flip-chip InGaN/GaN-based light-emitting diodes
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sg-ntu-dr.10356-818892023-02-28T19:22:18Z Decoupling contact and mirror: an effective way to improve the reflector for flip-chip InGaN/GaN-based light-emitting diodes Zhu, Binbin Liu, Wei Lu, Shunpeng Zhang, Yiping Hasanov, Namig Zhang, Xueliang Ji, Yun Zhang, Zi-Hui Tan, Swee Tiam Liu, Hongfei Demir, Hilmi Volkan School of Electrical and Electronic Engineering School of Physical and Mathematical Sciences Ohmic contact Decoupled 8 p. In the conventional fabrication process of the widely-adopted Ni/Ag/Ti/Au reflector for InGaN/GaN-based flip-chip light-emitting diodes (LEDs), the contact and the mirror are entangled together with contrary processing conditions which set constraints to the device performance severely. Here we first report the concept and its effectiveness of decoupling the contact formation and the mirror construction. The ohmic contact is first formed by depositing and annealing an extremely thin layer of Ni/Ag on top of p-GaN. The mirror construction is then carried out by depositing thick layer of Ag/Ti/Au without any annealing. Compared with the conventional fabrication method of the reflector, by which the whole stack of Ni/Ag/Ti/Au is deposited and annealed together, the optical output power is improved by more than 70% at 350 mA without compromising the electrical performance. The mechanism of decoupling the contact and the mirror is analyzed with the assistance of contactless sheet resistance measurement and secondary ion mass spectrometry (SIMS) depth profile analysis. NRF (Natl Research Foundation, S’pore) Accepted Version 2017-04-19T05:32:45Z 2019-12-06T14:42:25Z 2017-04-19T05:32:45Z 2019-12-06T14:42:25Z 2016 2016 Journal Article Zhu, B., Liu, W., Lu, S., Zhang, Y., Hasanov, N., Zhang, X., et al. (2016). Decoupling contact and mirror: an effective way to improve the reflector for flip-chip InGaN/GaN-based light-emitting diodes. Journal of Physics D: Applied Physics, 49(26), 265106-. 0022-3727 https://hdl.handle.net/10356/81889 http://hdl.handle.net/10220/42288 10.1088/0022-3727/49/26/265106 197830 en Journal of Physics D: Applied Physics © 2016 IOP Publishing Ltd. This is the author created version of a work that has been peer reviewed and accepted for publication by Journal of Physics D: Applied Physics, IOP Publishing Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1088/0022-3727/49/26/265106]. application/pdf |
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Ohmic contact Decoupled |
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Ohmic contact Decoupled Zhu, Binbin Liu, Wei Lu, Shunpeng Zhang, Yiping Hasanov, Namig Zhang, Xueliang Ji, Yun Zhang, Zi-Hui Tan, Swee Tiam Liu, Hongfei Demir, Hilmi Volkan Decoupling contact and mirror: an effective way to improve the reflector for flip-chip InGaN/GaN-based light-emitting diodes |
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8 p. |
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School of Electrical and Electronic Engineering |
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School of Electrical and Electronic Engineering Zhu, Binbin Liu, Wei Lu, Shunpeng Zhang, Yiping Hasanov, Namig Zhang, Xueliang Ji, Yun Zhang, Zi-Hui Tan, Swee Tiam Liu, Hongfei Demir, Hilmi Volkan |
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Article |
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Zhu, Binbin Liu, Wei Lu, Shunpeng Zhang, Yiping Hasanov, Namig Zhang, Xueliang Ji, Yun Zhang, Zi-Hui Tan, Swee Tiam Liu, Hongfei Demir, Hilmi Volkan |
author_sort |
Zhu, Binbin |
title |
Decoupling contact and mirror: an effective way to improve the reflector for flip-chip InGaN/GaN-based light-emitting diodes |
title_short |
Decoupling contact and mirror: an effective way to improve the reflector for flip-chip InGaN/GaN-based light-emitting diodes |
title_full |
Decoupling contact and mirror: an effective way to improve the reflector for flip-chip InGaN/GaN-based light-emitting diodes |
title_fullStr |
Decoupling contact and mirror: an effective way to improve the reflector for flip-chip InGaN/GaN-based light-emitting diodes |
title_full_unstemmed |
Decoupling contact and mirror: an effective way to improve the reflector for flip-chip InGaN/GaN-based light-emitting diodes |
title_sort |
decoupling contact and mirror: an effective way to improve the reflector for flip-chip ingan/gan-based light-emitting diodes |
publishDate |
2017 |
url |
https://hdl.handle.net/10356/81889 http://hdl.handle.net/10220/42288 |
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1759854487022862336 |