Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor
We report a sputtered PdO decorated TiO2 sensing layer by radiofrequency (RF) sputtering methods and demonstrated gas sensing performance for H2 gas. We prepared sputtered anatase TiO2 sensing films with 200 nm thickness and deposited a Pd layer on top of the TiO2 films with a thickness ranging from...
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sg-ntu-dr.10356-851712020-03-07T13:57:25Z Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor Lee, Jeong Hoon Kwak, Seungmin Lee, Jin-Hyung Kim, Inho Yoo, Yong Kyoung Lee, Tae Hoon Shim, Young-Seok Kim, Jinseok Lee, Kyu Hyoung School of Electrical and Electronic Engineering Hydrogen Gas PdO We report a sputtered PdO decorated TiO2 sensing layer by radiofrequency (RF) sputtering methods and demonstrated gas sensing performance for H2 gas. We prepared sputtered anatase TiO2 sensing films with 200 nm thickness and deposited a Pd layer on top of the TiO2 films with a thickness ranging from 3 nm to 13 nm. Using an in situ TiO2/Pd multilayer annealing process at 550°C for 1 hour, we observed that Pd turns into PdO by Auger electron spectroscopy (AES) depth profile and confirmed decorated PdO on TiO2 sensing layer from scanning electron microscope (SEM) and atomic-force microscope (AFM). We also observed a positive sensing signal for 3, 4.5, and 6.5 nm PdO decorated TiO2 sensor while we observed negative output signal for a 13.5 nm PdO decorated one. Using a microheater platform, we acquired fast response time as ~11 sec and sensitivity as 6 μV/ppm for 3 nm PdO under 33 mW power. Published version 2018-07-19T09:20:38Z 2019-12-06T15:58:40Z 2018-07-19T09:20:38Z 2019-12-06T15:58:40Z 2018 Journal Article Lee, J. H., Kwak, S., Lee, J.-H., Kim, I., Yoo, Y. K., Lee, T. H., et al. (2018). Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor. Journal of Nanomaterials, 2018, 8678519-. 1687-4110 https://hdl.handle.net/10356/85171 http://hdl.handle.net/10220/45144 10.1155/2018/8678519 en Journal of Nanomaterials © 2018 Jeong Hoon Lee et al. Tis is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. 8 p. application/pdf |
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Hydrogen Gas PdO Lee, Jeong Hoon Kwak, Seungmin Lee, Jin-Hyung Kim, Inho Yoo, Yong Kyoung Lee, Tae Hoon Shim, Young-Seok Kim, Jinseok Lee, Kyu Hyoung Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor |
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We report a sputtered PdO decorated TiO2 sensing layer by radiofrequency (RF) sputtering methods and demonstrated gas sensing performance for H2 gas. We prepared sputtered anatase TiO2 sensing films with 200 nm thickness and deposited a Pd layer on top of the TiO2 films with a thickness ranging from 3 nm to 13 nm. Using an in situ TiO2/Pd multilayer annealing process at 550°C for 1 hour, we observed that Pd turns into PdO by Auger electron spectroscopy (AES) depth profile and confirmed decorated PdO on TiO2 sensing layer from scanning electron microscope (SEM) and atomic-force microscope (AFM). We also observed a positive sensing signal for 3, 4.5, and 6.5 nm PdO decorated TiO2 sensor while we observed negative output signal for a 13.5 nm PdO decorated one. Using a microheater platform, we acquired fast response time as ~11 sec and sensitivity as 6 μV/ppm for 3 nm PdO under 33 mW power. |
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School of Electrical and Electronic Engineering |
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School of Electrical and Electronic Engineering Lee, Jeong Hoon Kwak, Seungmin Lee, Jin-Hyung Kim, Inho Yoo, Yong Kyoung Lee, Tae Hoon Shim, Young-Seok Kim, Jinseok Lee, Kyu Hyoung |
format |
Article |
author |
Lee, Jeong Hoon Kwak, Seungmin Lee, Jin-Hyung Kim, Inho Yoo, Yong Kyoung Lee, Tae Hoon Shim, Young-Seok Kim, Jinseok Lee, Kyu Hyoung |
author_sort |
Lee, Jeong Hoon |
title |
Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor |
title_short |
Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor |
title_full |
Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor |
title_fullStr |
Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor |
title_full_unstemmed |
Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor |
title_sort |
sputtered pdo decorated tio2 sensing layer for a hydrogen gas sensor |
publishDate |
2018 |
url |
https://hdl.handle.net/10356/85171 http://hdl.handle.net/10220/45144 |
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1681048343425318912 |