Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor

• Main Authors: Lee, Jeong Hoon, Kwak, Seungmin, Lee, Jin-Hyung, Kim, Inho, Yoo, Yong Kyoung, Lee, Tae Hoon, Shim, Young-Seok, Kim, Jinseok, Lee, Kyu Hyoung
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2018
• Subjects: Hydrogen Gas; PdO
• Online Access: https://hdl.handle.net/10356/85171; http://hdl.handle.net/10220/45144
• Institution: Nanyang Technological University

We report a sputtered PdO decorated TiO2 sensing layer by radiofrequency (RF) sputtering methods and demonstrated gas sensing performance for H2 gas. We prepared sputtered anatase TiO2 sensing films with 200 nm thickness and deposited a Pd layer on top of the TiO2 films with a thickness ranging from...