A computational design framework for two-layered elastic stamps in nanoimprint lithography and microcontact printing

• Main Authors: Taylor, Hayden, O’Rorke, Richard
• 其他作者: School of Materials Science and Engineering
• 格式: Article
• 語言: English
• 出版: 2019
• 主題: Computational Design; Nanoimprint Lithography; DRNTU::Engineering::Materials
• 在線閱讀: https://hdl.handle.net/10356/85324; http://hdl.handle.net/10220/48272
• 機構: Nanyang Technological University

Mechanical micro- and nano-patterning processes rely on engineering the interactions between a stamp and a substrate to accommodate surface roughness and particle defects while retaining the geometric integrity of printed features. We introduce a set of algorithms for rapidly simulating the stamp-su...