A computational design framework for two-layered elastic stamps in nanoimprint lithography and microcontact printing

Mechanical micro- and nano-patterning processes rely on engineering the interactions between a stamp and a substrate to accommodate surface roughness and particle defects while retaining the geometric integrity of printed features. We introduce a set of algorithms for rapidly simulating the stamp-su...

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Bibliographic Details
Main Authors: Taylor, Hayden, O’Rorke, Richard
Other Authors: School of Materials Science and Engineering
Format: Article
Language:English
Published: 2019
Subjects:
Online Access:https://hdl.handle.net/10356/85324
http://hdl.handle.net/10220/48272
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Institution: Nanyang Technological University
Language: English
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