A computational design framework for two-layered elastic stamps in nanoimprint lithography and microcontact printing
Mechanical micro- and nano-patterning processes rely on engineering the interactions between a stamp and a substrate to accommodate surface roughness and particle defects while retaining the geometric integrity of printed features. We introduce a set of algorithms for rapidly simulating the stamp-su...
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Main Authors: | , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2019
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/85324 http://hdl.handle.net/10220/48272 |
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Institution: | Nanyang Technological University |
Language: | English |
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