A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability

• Main Authors: Baek, Jong Dae, Yu, Chen-Chiang, Su, Pei-Chen
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2017
• Subjects: Micro-solid Oxide Fuel Cell; Nanothin Film Electrolyte Array
• Online Access: https://hdl.handle.net/10356/85446; http://hdl.handle.net/10220/43700
• Institution: Nanyang Technological University

A silicon-based micro-solid oxide fuel cell (μ-SOFC) with electrolyte membrane array embedded in a thin silicon supporting membrane, featuring a unique edge reinforcement structure, was demonstrated by utilizing simple silicon micromachining processes. The square silicon supporting membrane, fabrica...