A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability

A silicon-based micro-solid oxide fuel cell (μ-SOFC) with electrolyte membrane array embedded in a thin silicon supporting membrane, featuring a unique edge reinforcement structure, was demonstrated by utilizing simple silicon micromachining processes. The square silicon supporting membrane, fabrica...

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Main Authors: Baek, Jong Dae, Yu, Chen-Chiang, Su, Pei-Chen
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2017
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Online Access:https://hdl.handle.net/10356/85446
http://hdl.handle.net/10220/43700
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-854462021-01-14T08:19:03Z A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability Baek, Jong Dae Yu, Chen-Chiang Su, Pei-Chen School of Mechanical and Aerospace Engineering Interdisciplinary Graduate School (IGS) Energy Research Institute @ NTU (ERI@N) Micro-solid Oxide Fuel Cell Nanothin Film Electrolyte Array A silicon-based micro-solid oxide fuel cell (μ-SOFC) with electrolyte membrane array embedded in a thin silicon supporting membrane, featuring a unique edge reinforcement structure, was demonstrated by utilizing simple silicon micromachining processes. The square silicon supporting membrane, fabricated by combining deep reactive ion etching and through-wafer wet etching processes, has thicker edges and corners than the center portion of the membrane, which effectively improved the mechanical stability of the entire fuel cell array during cell fabrication and cell operation. The 20 μm thick single crystalline silicon membrane supports a large number of 80 nm thick free-standing yttria-stabilized zirconia (YSZ) electrolytes. The fuel cell array was stably maintained at the open circuit voltage (OCV) of 1.04 V for more than 30 h of operation at 350 °C. A high peak power density of 317 mW/cm2 was obtained at 400 °C. During a rigorous in situ thermal cycling between 150 and 400 °C at a fast cooling and heating rate of 25 °C/min, the OCV of the μ-SOFC recovered to its high value of 1.07 V without any drop caused by membrane failure, which justifies the superior thermal stability of this novel cell architecture. MOE (Min. of Education, S’pore) Accepted version 2017-09-07T04:54:53Z 2019-12-06T16:03:49Z 2017-09-07T04:54:53Z 2019-12-06T16:03:49Z 2016 Journal Article Baek, J. D., Yu, C.-C., & Su, P.-C. (2016). A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability. Nano Letters, 16(4), 2413-2417. 1530-6984 https://hdl.handle.net/10356/85446 http://hdl.handle.net/10220/43700 10.1021/acs.nanolett.5b05221 en Nano Letters © 2016 American Chemical Society. This is the author created version of a work that has been peer reviewed and accepted for publication by Nano Letters, American Chemical Society. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1021/acs.nanolett.5b05221]. 19 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Micro-solid Oxide Fuel Cell
Nanothin Film Electrolyte Array
spellingShingle Micro-solid Oxide Fuel Cell
Nanothin Film Electrolyte Array
Baek, Jong Dae
Yu, Chen-Chiang
Su, Pei-Chen
A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability
description A silicon-based micro-solid oxide fuel cell (μ-SOFC) with electrolyte membrane array embedded in a thin silicon supporting membrane, featuring a unique edge reinforcement structure, was demonstrated by utilizing simple silicon micromachining processes. The square silicon supporting membrane, fabricated by combining deep reactive ion etching and through-wafer wet etching processes, has thicker edges and corners than the center portion of the membrane, which effectively improved the mechanical stability of the entire fuel cell array during cell fabrication and cell operation. The 20 μm thick single crystalline silicon membrane supports a large number of 80 nm thick free-standing yttria-stabilized zirconia (YSZ) electrolytes. The fuel cell array was stably maintained at the open circuit voltage (OCV) of 1.04 V for more than 30 h of operation at 350 °C. A high peak power density of 317 mW/cm2 was obtained at 400 °C. During a rigorous in situ thermal cycling between 150 and 400 °C at a fast cooling and heating rate of 25 °C/min, the OCV of the μ-SOFC recovered to its high value of 1.07 V without any drop caused by membrane failure, which justifies the superior thermal stability of this novel cell architecture.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Baek, Jong Dae
Yu, Chen-Chiang
Su, Pei-Chen
format Article
author Baek, Jong Dae
Yu, Chen-Chiang
Su, Pei-Chen
author_sort Baek, Jong Dae
title A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability
title_short A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability
title_full A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability
title_fullStr A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability
title_full_unstemmed A Silicon-Based Nanothin Film Solid Oxide Fuel Cell Array with Edge Reinforced Support for Enhanced Thermal Mechanical Stability
title_sort silicon-based nanothin film solid oxide fuel cell array with edge reinforced support for enhanced thermal mechanical stability
publishDate 2017
url https://hdl.handle.net/10356/85446
http://hdl.handle.net/10220/43700
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