Rapid thermal processing of chemical-solution-deposited yttrium-doped barium zirconate thin films

• المؤلفون الرئيسيون: Xie, Hanlin, Biswas, Mridula, Fan, Liangdong, Li, Yong, Su, Pei-Chen
• مؤلفون آخرون: School of Mechanical and Aerospace Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2017
• الموضوعات: Rapid Thermal Processing; Chemical Solution Deposition
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/85461; http://hdl.handle.net/10220/43699
• المؤسسة: Nanyang Technological University

In this paper, dense and crack-free yttrium-doped barium zirconate (BZY) thin films were fabricated by chemical solution deposition (CSD) with rapid thermal processing (RTP) at low sintering temperature. BZY thin film without barium carbonate phase was obtainable after annealing at 700 °C for 1 h, w...