Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method

• Main Authors: Xie, Hanlin, Su, Pei-Chen
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2017
• Subjects: Sol–gel process; Spin coating
• Online Access: https://hdl.handle.net/10356/86276; http://hdl.handle.net/10220/43971
• Institution: Nanyang Technological University

A modified sol–gel process was developed for the fabrication of sub-micrometer scale yttrium-doped barium zirconate (BZY) thin film at much lower processing temperatures. The film was fabricated by direct spin-coating of the sol on a Si3N4 passivated Si substrate, followed by low temperature thermal...