Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method

Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method

A modified sol–gel process was developed for the fabrication of sub-micrometer scale yttrium-doped barium zirconate (BZY) thin film at much lower processing temperatures. The film was fabricated by direct spin-coating of the sol on a Si3N4 passivated Si substrate, followed by low temperature thermal...

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Main Authors: Xie, Hanlin, Su, Pei-Chen
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2017
Subjects:
Sol–gel process
Spin coating
Online Access:https://hdl.handle.net/10356/86276
http://hdl.handle.net/10220/43971
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-862762020-03-07T13:19:22Z Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method Xie, Hanlin Su, Pei-Chen School of Mechanical and Aerospace Engineering Sol–gel process Spin coating A modified sol–gel process was developed for the fabrication of sub-micrometer scale yttrium-doped barium zirconate (BZY) thin film at much lower processing temperatures. The film was fabricated by direct spin-coating of the sol on a Si3N4 passivated Si substrate, followed by low temperature thermal annealing at 1000 °C, and single BZY phase without barium carbonate residue was obtained. A 200 nm-thick thin film without obvious through-film cracks was fabricated with optimized process parameters of sol concentration and heating rate. The stoichiometry of the BZY thin film was well-controlled and no Ba evaporation was observed due to the low processing temperature. The combination of sol–gel and spin coating method can be a promising alternative to vacuum-based thin film deposition techniques for the fabrication of sub-micrometer scale BZY thin film. NRF (Natl Research Foundation, S’pore) MOE (Min. of Education, S’pore) 2017-11-01T07:04:32Z 2019-12-06T16:19:26Z 2017-11-01T07:04:32Z 2019-12-06T16:19:26Z 2014 Journal Article Xie, H., & Su, P.-C. (2015). Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method. Thin Solid Films, 584, 116-119. 0040-6090 https://hdl.handle.net/10356/86276 http://hdl.handle.net/10220/43971 10.1016/j.tsf.2014.11.093 en Thin Solid Films © 2014 Elsevier.
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic Sol–gel process
Spin coating
spellingShingle Sol–gel process
Spin coating
Xie, Hanlin
Su, Pei-Chen
Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method
description A modified sol–gel process was developed for the fabrication of sub-micrometer scale yttrium-doped barium zirconate (BZY) thin film at much lower processing temperatures. The film was fabricated by direct spin-coating of the sol on a Si3N4 passivated Si substrate, followed by low temperature thermal annealing at 1000 °C, and single BZY phase without barium carbonate residue was obtained. A 200 nm-thick thin film without obvious through-film cracks was fabricated with optimized process parameters of sol concentration and heating rate. The stoichiometry of the BZY thin film was well-controlled and no Ba evaporation was observed due to the low processing temperature. The combination of sol–gel and spin coating method can be a promising alternative to vacuum-based thin film deposition techniques for the fabrication of sub-micrometer scale BZY thin film.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Xie, Hanlin
Su, Pei-Chen
format Article
author Xie, Hanlin
Su, Pei-Chen
author_sort Xie, Hanlin
title Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method
title_short Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method
title_full Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method
title_fullStr Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method
title_full_unstemmed Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method
title_sort fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method
publishDate 2017
url https://hdl.handle.net/10356/86276
http://hdl.handle.net/10220/43971
_version_ 1681041481638346752

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