EUV generation by plasmonic field enhancement using nanostructures
Plasmonic field enhancement using metal nanostructures is investigated to boost the peak intensity of the incident femtosecond laser by a factor of greater than 20 dB while retaining the original ultrashort pulse dynamics. This method enables extreme ultraviolet (EUV) light generation directly from...
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2018
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sg-ntu-dr.10356-885842023-03-04T17:08:00Z EUV generation by plasmonic field enhancement using nanostructures Han, Seunghwoi Kim, Hyunwoong Kim, Young-Jin Kim, Seung-Woo Asundi, Anand K. Fu, Yu School of Mechanical and Aerospace Engineering Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015) EUV Light Source DRNTU::Engineering::Mechanical engineering Plasmonic Field Enhancement Plasmonic field enhancement using metal nanostructures is investigated to boost the peak intensity of the incident femtosecond laser by a factor of greater than 20 dB while retaining the original ultrashort pulse dynamics. This method enables extreme ultraviolet (EUV) light generation directly from moderate femtosecond pulses of ~1 x 1011 W/cm2 intensities without auxiliary power amplification, demonstrating a possibility of achieving robust and reproducible EUV sources of the nano-scale for diverse EUV applications for microscopy, lithography and spectroscopy. Published version 2018-12-13T08:39:23Z 2019-12-06T17:06:38Z 2018-12-13T08:39:23Z 2019-12-06T17:06:38Z 2015 Conference Paper Han, S., Kim, H., Kim, Y.-J., & Kim, S.-W. (2015). EUV generation by plasmonic field enhancement using nanostructures. Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015), 9524, 95241S-. doi:10.1117/12.2189570 https://hdl.handle.net/10356/88584 http://hdl.handle.net/10220/46952 10.1117/12.2189570 en © 2015 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015) and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: [http://dx.doi.org/10.1117/12.2189570]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. 4 p. application/pdf |
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Nanyang Technological University |
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| topic |
EUV Light Source DRNTU::Engineering::Mechanical engineering Plasmonic Field Enhancement |
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EUV Light Source DRNTU::Engineering::Mechanical engineering Plasmonic Field Enhancement Han, Seunghwoi Kim, Hyunwoong Kim, Young-Jin Kim, Seung-Woo EUV generation by plasmonic field enhancement using nanostructures |
| description |
Plasmonic field enhancement using metal nanostructures is investigated to boost the peak intensity of the incident femtosecond laser by a factor of greater than 20 dB while retaining the original ultrashort pulse dynamics. This method enables extreme ultraviolet (EUV) light generation directly from moderate femtosecond pulses of ~1 x 1011 W/cm2 intensities without auxiliary power amplification, demonstrating a possibility of achieving robust and reproducible EUV sources of the nano-scale for diverse EUV applications for microscopy, lithography and spectroscopy. |
| author2 |
Asundi, Anand K. |
| author_facet |
Asundi, Anand K. Han, Seunghwoi Kim, Hyunwoong Kim, Young-Jin Kim, Seung-Woo |
| format |
Conference or Workshop Item |
| author |
Han, Seunghwoi Kim, Hyunwoong Kim, Young-Jin Kim, Seung-Woo |
| author_sort |
Han, Seunghwoi |
| title |
EUV generation by plasmonic field enhancement using nanostructures |
| title_short |
EUV generation by plasmonic field enhancement using nanostructures |
| title_full |
EUV generation by plasmonic field enhancement using nanostructures |
| title_fullStr |
EUV generation by plasmonic field enhancement using nanostructures |
| title_full_unstemmed |
EUV generation by plasmonic field enhancement using nanostructures |
| title_sort |
euv generation by plasmonic field enhancement using nanostructures |
| publishDate |
2018 |
| url |
https://hdl.handle.net/10356/88584 http://hdl.handle.net/10220/46952 |
| _version_ |
1759857210312097792 |