EUV generation by plasmonic field enhancement using nanostructures

• Main Authors: Han, Seunghwoi, Kim, Hyunwoong, Kim, Young-Jin, Kim, Seung-Woo
• 其他作者: Asundi, Anand K.
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2018
• 主題: EUV Light Source; DRNTU::Engineering::Mechanical engineering; Plasmonic Field Enhancement
• 在線閱讀: https://hdl.handle.net/10356/88584; http://hdl.handle.net/10220/46952

Plasmonic field enhancement using metal nanostructures is investigated to boost the peak intensity of the incident femtosecond laser by a factor of greater than 20 dB while retaining the original ultrashort pulse dynamics. This method enables extreme ultraviolet (EUV) light generation directly from...