Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical components

• Main Authors: Nguyen, N. Y., Tian, Y. B., Zhong, Z. W.
• Other Authors: Asundi, Anand K.
• Format: Conference or Workshop Item
• Language: English
• Published: 2018
• Subjects: DRNTU::Engineering::Mechanical engineering; Optics Fabrication; Chemical Mechanical Polishing
• Online Access: https://hdl.handle.net/10356/88737; http://hdl.handle.net/10220/46966
• Institution: Nanyang Technological University

Fixed abrasive chemical mechanical polishing has some advantages in generating planarity surfaces of optical components. The surface after polishing has better uniformity, and the material removal rate is much more than the traditional chemical mechanical polishing. The pad wear shape has a signific...