Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses

Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses

Fast, precise 3-D measurement of step-structures fabricated on microelectronic products is essential for quality assurance of semiconductor, flat panel display and photovoltaic products. Optical interferometers have long been used, but not that wide-spread for step-structures due to their phase ambi...

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Bibliographic Details
Main Authors: Kim, Young-Jin, Choi, Minah, Lee, Keunwoo, Jang, Heesuk, Park, Jiyong, Kim, Seung-Woo
Other Authors: Tian, Ailing
Format: Conference or Workshop Item
Language:English
Published: 2018
Subjects:
DRNTU::Engineering::Mechanical engineering
Precision Measurement
Femtosecond Laser
Online Access:https://hdl.handle.net/10356/89156
http://hdl.handle.net/10220/47015
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Institution: Nanyang Technological University
Language: English

Internet

https://hdl.handle.net/10356/89156
http://hdl.handle.net/10220/47015

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