Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses

• Main Authors: Kim, Young-Jin, Choi, Minah, Lee, Keunwoo, Jang, Heesuk, Park, Jiyong, Kim, Seung-Woo
• Other Authors: Tian, Ailing
• Format: Conference or Workshop Item
• Language: English
• Published: 2018
• Subjects: DRNTU::Engineering::Mechanical engineering; Precision Measurement; Femtosecond Laser
• Online Access: https://hdl.handle.net/10356/89156; http://hdl.handle.net/10220/47015
• Institution: Nanyang Technological University

Fast, precise 3-D measurement of step-structures fabricated on microelectronic products is essential for quality assurance of semiconductor, flat panel display and photovoltaic products. Optical interferometers have long been used, but not that wide-spread for step-structures due to their phase ambi...