Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter

• Main Authors: Adhikari, Achyut, Dev, Kapil, Asundi, Anand
• 其他作者: Creath, Katherine
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2018
• 主題: DRNTU::Engineering::Mechanical engineering; Scanning Electron Microscopy (SEM); Wire Grid Polarizers (WGP)
• 在線閱讀: https://hdl.handle.net/10356/90175; http://hdl.handle.net/10220/47214

Wire grid polarizers (WGP), are sub-wavelength gratings with applications in display projection system due to their compact size, wide field of view and long-term stability. Measurement and testing of these structures are important to optimize their use. This is done by first measuring the Mueller M...