Fabrication of periodic square arrays by angle-resolved nanosphere lithography

• Main Authors: Lee, Kwang Hong, Chen, Qiu Ling, Yip, Chan Hoe, Yan, Qingfeng, Wong, Chee Cheong
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: https://hdl.handle.net/10356/90934; http://hdl.handle.net/10220/6813
• Institution: Nanyang Technological University

We investigate the fabrication of periodic square arrays of solid gold islands by angle-resolved nanosphere lithography (ARNSL) in conjunction with thermal evaporation and etching. By varying θ (the tilt angle between the direction of gold deposition beam and the substrate surface normal) and (the...