System development for laser writing lithography and holographic interference lithography

• Main Author: Xu, Feng Lan.
• Other Authors: Chan, Yuen Chuen
• Format: Theses and Dissertations
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/19585
• Institution: Nanyang Technological University

Optoelectronic technology and optoelectronic integrated circuits (OEICs) are widely believed to be essential building blocks for the emerging information age. This has encouraged expanded research and development activities in this technology, which requires both flexible and low cost fabrication te...