System development for laser writing lithography and holographic interference lithography

Optoelectronic technology and optoelectronic integrated circuits (OEICs) are widely believed to be essential building blocks for the emerging information age. This has encouraged expanded research and development activities in this technology, which requires both flexible and low cost fabrication te...

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Bibliographic Details
Main Author: Xu, Feng Lan.
Other Authors: Chan, Yuen Chuen
Format: Theses and Dissertations
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/19585
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Institution: Nanyang Technological University
Language: English
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