Vibration measurement of a micro-structure by digital holographic microscopy

A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of t...

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Main Authors:	Shi, Hongjian, Fu, Yu, Quan, Chenggen, Tay, Cho Jui, He, Xiaoling
Other Authors:	Temasek Laboratories
Format:	Article
Language:	English
Published:	2011
Subjects:	DRNTU::Science::Physics::Optics and light
Online Access:	https://hdl.handle.net/10356/91208 http://hdl.handle.net/10220/6700
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Institution:	Nanyang Technological University
Language:	English

id	sg-ntu-dr.10356-91208
record_format	dspace
spelling	sg-ntu-dr.10356-912082020-09-26T22:19:20Z Vibration measurement of a micro-structure by digital holographic microscopy Shi, Hongjian Fu, Yu Quan, Chenggen Tay, Cho Jui He, Xiaoling Temasek Laboratories DRNTU::Science::Physics::Optics and light A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of the object at different instants are obtained by digital reconstruction. The displacement, velocity and acceleration are evaluated by both spatial and temporal Fourier and windowed Fourier analyses. The results show that digital holographic microscopy with Fourier analyses is an effective method for evaluating the dynamic characteristics of a MEMS component. Accepted version 2011-01-25T03:40:46Z 2019-12-06T18:01:37Z 2011-01-25T03:40:46Z 2019-12-06T18:01:37Z 2009 2009 Journal Article Shi, H., Fu, Y., Quan, C., Tay, C. J., & He, X. (2009). Vibration measurement of a micro-structure by digital holographic microscopy. Measurement Science and Technology, 20(6). 0957-0233 https://hdl.handle.net/10356/91208 http://hdl.handle.net/10220/6700 10.1088/0957-0233/20/6/065301 en Measurement science and technology This is the author created version of a work that has been peer reviewed and accepted for publication by Measurement Science & Technology, IOP Publishing Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [DOI:http://dx.doi.org/10.1088/0957-0233/20/6/065301]. 21 p. application/pdf
institution	Nanyang Technological University
building	NTU Library
country	Singapore
collection	DR-NTU
language	English
topic	DRNTU::Science::Physics::Optics and light
spellingShingle	DRNTU::Science::Physics::Optics and light Shi, Hongjian Fu, Yu Quan, Chenggen Tay, Cho Jui He, Xiaoling Vibration measurement of a micro-structure by digital holographic microscopy
description	A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of the object at different instants are obtained by digital reconstruction. The displacement, velocity and acceleration are evaluated by both spatial and temporal Fourier and windowed Fourier analyses. The results show that digital holographic microscopy with Fourier analyses is an effective method for evaluating the dynamic characteristics of a MEMS component.
author2	Temasek Laboratories
author_facet	Temasek Laboratories Shi, Hongjian Fu, Yu Quan, Chenggen Tay, Cho Jui He, Xiaoling
format	Article
author	Shi, Hongjian Fu, Yu Quan, Chenggen Tay, Cho Jui He, Xiaoling
author_sort	Shi, Hongjian
title	Vibration measurement of a micro-structure by digital holographic microscopy
title_short	Vibration measurement of a micro-structure by digital holographic microscopy
title_full	Vibration measurement of a micro-structure by digital holographic microscopy
title_fullStr	Vibration measurement of a micro-structure by digital holographic microscopy
title_full_unstemmed	Vibration measurement of a micro-structure by digital holographic microscopy
title_sort	vibration measurement of a micro-structure by digital holographic microscopy
publishDate	2011
url	https://hdl.handle.net/10356/91208 http://hdl.handle.net/10220/6700
_version_	1681059140505436160

Vibration measurement of a micro-structure by digital holographic microscopy

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