Vibration measurement of a micro-structure by digital holographic microscopy

• Main Authors: Shi, Hongjian, Fu, Yu, Quan, Chenggen, Tay, Cho Jui, He, Xiaoling
• Other Authors: Temasek Laboratories
• Format: Article
• Language: English
• Published: 2011
• Subjects: DRNTU::Science::Physics::Optics and light
• Online Access: https://hdl.handle.net/10356/91208; http://hdl.handle.net/10220/6700
• Institution: Nanyang Technological University

A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of t...