Vibration measurement of a micro-structure by digital holographic microscopy

• المؤلفون الرئيسيون: Shi, Hongjian, Fu, Yu, Quan, Chenggen, Tay, Cho Jui, He, Xiaoling
• مؤلفون آخرون: Temasek Laboratories
• التنسيق: مقال
• اللغة: English
• منشور في: 2011
• الموضوعات: DRNTU::Science::Physics::Optics and light
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/91208; http://hdl.handle.net/10220/6700

A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of t...