Kinetics of stop-flow atomic layer deposition for high aspect ratio template filling through photonic band gap measurements

• Main Authors: Karuturi, Siva Krishna, Liu, Lijun, Su, Liap Tat, Zhao, Yang, Fan, Hong Jin, Ge, Xiaochen, He, Sailing, Tok, Alfred Iing Yoong
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Materials::Photonics and optoelectronics materials
• Online Access: https://hdl.handle.net/10356/91348; http://hdl.handle.net/10220/7416
• Institution: Nanyang Technological University

Atomic layer deposition (ALD) is shown as a unique method to produce high aspect ratio (AR) nanostructures through conformal filling and replication of high AR templates. The stop-flow process is often used as an alternative to the conventional continuous flow process to obtain high step coverage. H...