Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics

SnO2 nanorods were successfully deposited on 3″ Si/SiO2 wafers by inductively coupled plasma-enhanced chemical vapour deposition (PECVD) and a wafer-level patterning of nanorods layer for miniaturized solid state gas sensor fabrication were performed. Uniform needle-shaped SnO2 nanorods in situ grow...

Full description

Saved in:
Bibliographic Details
Main Authors: Forleo, Angiola, Francioso, Luca, Capone, Simonetta, Casino, Flavio, Siciliano, Pietro, Tan, Ooi Kiang, Huang, Hui
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2011
Subjects:
Online Access:https://hdl.handle.net/10356/91596
http://hdl.handle.net/10220/7024
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Language: English
id sg-ntu-dr.10356-91596
record_format dspace
spelling sg-ntu-dr.10356-915962020-03-07T14:02:41Z Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics Forleo, Angiola Francioso, Luca Capone, Simonetta Casino, Flavio Siciliano, Pietro Tan, Ooi Kiang Huang, Hui School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics SnO2 nanorods were successfully deposited on 3″ Si/SiO2 wafers by inductively coupled plasma-enhanced chemical vapour deposition (PECVD) and a wafer-level patterning of nanorods layer for miniaturized solid state gas sensor fabrication were performed. Uniform needle-shaped SnO2 nanorods in situ grown were obtained under catalyst- and high temperature treatment-free growth condition. These nanorods have an average diameter between 5 and 15 nm and a length of 160–300 nm. The SnO2-nanorods based gas sensors were tested towards NH3 and CH3OH and gas sensing tests show remarkable response, showing promising and repeatable results compared with the SnO2 thin films gas sensors. Accepted version 2011-09-08T06:18:37Z 2019-12-06T18:08:36Z 2011-09-08T06:18:37Z 2019-12-06T18:08:36Z 2010 2010 Journal Article Forleo, A., Francioso, L., Capone, S., Casino, F., Siciliano, P., Tan, O. K., & et al. (2010). Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics. Sensors and Actuators B: Chemical, 154, 283-287. https://hdl.handle.net/10356/91596 http://hdl.handle.net/10220/7024 10.1016/j.snb.2010.01.010 160002 en Sensors and actuators B: chemical © 2010 Elsevier. This is the author created version of a work that has been peer reviewed and accepted for publication by Sensors and Actuators B: Chemical, Elsevier.  It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document.  The published version is available at: http://dx.doi.org/10.1016/j.snb.2010.01.010. 5 p. application/pdf
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Forleo, Angiola
Francioso, Luca
Capone, Simonetta
Casino, Flavio
Siciliano, Pietro
Tan, Ooi Kiang
Huang, Hui
Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics
description SnO2 nanorods were successfully deposited on 3″ Si/SiO2 wafers by inductively coupled plasma-enhanced chemical vapour deposition (PECVD) and a wafer-level patterning of nanorods layer for miniaturized solid state gas sensor fabrication were performed. Uniform needle-shaped SnO2 nanorods in situ grown were obtained under catalyst- and high temperature treatment-free growth condition. These nanorods have an average diameter between 5 and 15 nm and a length of 160–300 nm. The SnO2-nanorods based gas sensors were tested towards NH3 and CH3OH and gas sensing tests show remarkable response, showing promising and repeatable results compared with the SnO2 thin films gas sensors.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Forleo, Angiola
Francioso, Luca
Capone, Simonetta
Casino, Flavio
Siciliano, Pietro
Tan, Ooi Kiang
Huang, Hui
format Article
author Forleo, Angiola
Francioso, Luca
Capone, Simonetta
Casino, Flavio
Siciliano, Pietro
Tan, Ooi Kiang
Huang, Hui
author_sort Forleo, Angiola
title Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics
title_short Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics
title_full Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics
title_fullStr Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics
title_full_unstemmed Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics
title_sort fabrication at wafer level of miniaturized gas sensors based on sno2 nanorods deposited by pecvd and gas sensing characteristics
publishDate 2011
url https://hdl.handle.net/10356/91596
http://hdl.handle.net/10220/7024
_version_ 1681033968901685248