A fully polymeric micropump with piezoelectric actuator

• Main Authors: Nguyen, Nam-Trung, Truong, Thai-Quang
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: https://hdl.handle.net/10356/93888; http://hdl.handle.net/10220/7808
• Institution: Nanyang Technological University

This paper presents a new concept of designing and fabricating polymeric micropumps. The micro pump is made of SU-8 photoresist and polymethylmethacrylate (PMMA). The key elements of the micropump are the micro check valves, which are fabricated in a 100-μm-thick SU-8 film. The SU-8 part is designed...