A polymeric piezoelectric micropump based on lamination technology

• Main Authors: Truong, Thai-Quang, Nguyen, Nam-Trung
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Mechanical engineering::Mechatronics
• Online Access: https://hdl.handle.net/10356/106456; http://hdl.handle.net/10220/24007; http://dx.doi.org/10.1088/0960-1317/14/4/026
• Institution: Nanyang Technological University

This paper presents the first micropumps assembled using polymeric lamination technology. Each pump consists of two 100 ?m thick, 10 mm diameter SU-8 discs; two 1.5 mm thick, 15 mm diameter polymethylmethacrylate (PMMA) discs; and one piezo disc. The SU-8 parts were fabricated by a two-mask polymeri...