A polymeric piezoelectric micropump based on lamination technology
This paper presents the first micropumps assembled using polymeric lamination technology. Each pump consists of two 100 ?m thick, 10 mm diameter SU-8 discs; two 1.5 mm thick, 15 mm diameter polymethylmethacrylate (PMMA) discs; and one piezo disc. The SU-8 parts were fabricated by a two-mask polymeri...
Saved in:
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2014
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/106456 http://hdl.handle.net/10220/24007 http://dx.doi.org/10.1088/0960-1317/14/4/026 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
Language: | English |
id |
sg-ntu-dr.10356-106456 |
---|---|
record_format |
dspace |
spelling |
sg-ntu-dr.10356-1064562019-12-06T22:12:12Z A polymeric piezoelectric micropump based on lamination technology Truong, Thai-Quang Nguyen, Nam-Trung School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering::Mechatronics This paper presents the first micropumps assembled using polymeric lamination technology. Each pump consists of two 100 ?m thick, 10 mm diameter SU-8 discs; two 1.5 mm thick, 15 mm diameter polymethylmethacrylate (PMMA) discs; and one piezo disc. The SU-8 parts were fabricated by a two-mask polymeric surface micromachining process with silicon as the sacrificial material. Each SU-8 disc has one micro check valve. The valve is a 1 mm plate suspended on a compliant orthoplanar spring. The cross section of the spring beam has a dimension of 100 ?m × 100 ?m. The PMMA parts were machined from an extrusion PMMA sheet by CO2 laser. An off-the-shelf piezo bimorph disc worked as both actuator and pump membrane. The pump was assembled using adhesive bonding. The adhesive tapes were cut by the same laser system. Alignment pins were used in the assembly process. With a drive voltage of ?150 V the fabricated micropumps have been able to provide flow rates up to 2.9 ml min?1 and back pressures up to 1.6 m of water. The pump design and the polymeric technologies prove the feasibility of making more complex microfluidic systems based on the presented lamination approach. 2014-10-13T05:46:41Z 2019-12-06T22:12:12Z 2014-10-13T05:46:41Z 2019-12-06T22:12:12Z 2004 2004 Journal Article Truong, T.-Q., & Nguyen, N.-T. (2004). A polymeric piezoelectric micropump based on lamination technology. Journal of micromechanics and microengineering, 14(4), 632-638. https://hdl.handle.net/10356/106456 http://hdl.handle.net/10220/24007 http://dx.doi.org/10.1088/0960-1317/14/4/026 86951 en Journal of micromechanics and microengineering © 2004 IOP Publishing Ltd. 8 p. |
institution |
Nanyang Technological University |
building |
NTU Library |
country |
Singapore |
collection |
DR-NTU |
language |
English |
topic |
DRNTU::Engineering::Mechanical engineering::Mechatronics |
spellingShingle |
DRNTU::Engineering::Mechanical engineering::Mechatronics Truong, Thai-Quang Nguyen, Nam-Trung A polymeric piezoelectric micropump based on lamination technology |
description |
This paper presents the first micropumps assembled using polymeric lamination technology. Each pump consists of two 100 ?m thick, 10 mm diameter SU-8 discs; two 1.5 mm thick, 15 mm diameter polymethylmethacrylate (PMMA) discs; and one piezo disc. The SU-8 parts were fabricated by a two-mask polymeric surface micromachining process with silicon as the sacrificial material. Each SU-8 disc has one micro check valve. The valve is a 1 mm plate suspended on a compliant orthoplanar spring. The cross section of the spring beam has a dimension of 100 ?m × 100 ?m. The PMMA parts were machined from an extrusion PMMA sheet by CO2 laser. An off-the-shelf piezo bimorph disc worked as both actuator and pump membrane. The pump was assembled using adhesive bonding. The adhesive tapes were cut by the same laser system. Alignment pins were used in the assembly process. With a drive voltage of ?150 V the fabricated micropumps have been able to provide flow rates up to 2.9 ml min?1 and back pressures up to 1.6 m of water. The pump design and the polymeric technologies prove the feasibility of making more complex microfluidic systems based on the presented lamination approach. |
author2 |
School of Mechanical and Aerospace Engineering |
author_facet |
School of Mechanical and Aerospace Engineering Truong, Thai-Quang Nguyen, Nam-Trung |
format |
Article |
author |
Truong, Thai-Quang Nguyen, Nam-Trung |
author_sort |
Truong, Thai-Quang |
title |
A polymeric piezoelectric micropump based on lamination technology |
title_short |
A polymeric piezoelectric micropump based on lamination technology |
title_full |
A polymeric piezoelectric micropump based on lamination technology |
title_fullStr |
A polymeric piezoelectric micropump based on lamination technology |
title_full_unstemmed |
A polymeric piezoelectric micropump based on lamination technology |
title_sort |
polymeric piezoelectric micropump based on lamination technology |
publishDate |
2014 |
url |
https://hdl.handle.net/10356/106456 http://hdl.handle.net/10220/24007 http://dx.doi.org/10.1088/0960-1317/14/4/026 |
_version_ |
1681034227657736192 |