CMOS-compatible nanowire sensor arrays for detection of cellular bioelectricity

CMOS-compatible nanowire sensor arrays for detection of cellular bioelectricity

Perfectly aligned arrays of long silicon nanowires fabricated using a top–down complementary metal oxide semiconductor (CMOS) compatible approach and their ability for real-time extracellular recording of cellular bioelectricity are presented. The technique enables noninvasive, high-sensitivity, hig...

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Bibliographic Details
Main Authors: Chen, Peng, Ye, Feng, Balasubramanian, Narayanan, Pui, Tze Sian, Agarwal, Ajay
Other Authors: School of Chemical and Biomedical Engineering
Format: Article
Language:English
Published: 2012
Subjects:
DRNTU::Engineering::Chemical engineering::Biochemical engineering
Online Access:https://hdl.handle.net/10356/94400
http://hdl.handle.net/10220/7487
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Institution: Nanyang Technological University
Language: English
Description
Summary:Perfectly aligned arrays of long silicon nanowires fabricated using a top–down complementary metal oxide semiconductor (CMOS) compatible approach and their ability for real-time extracellular recording of cellular bioelectricity are presented. The technique enables noninvasive, high-sensitivity, high-throughput, long-term electrophysiology measurements at the single-cell level or from tissues.

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