CMOS-compatible nanowire sensor arrays for detection of cellular bioelectricity

• Main Authors: Chen, Peng, Ye, Feng, Balasubramanian, Narayanan, Pui, Tze Sian, Agarwal, Ajay
• Other Authors: School of Chemical and Biomedical Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Chemical engineering::Biochemical engineering
• Online Access: https://hdl.handle.net/10356/94400; http://hdl.handle.net/10220/7487
• Institution: Nanyang Technological University

Perfectly aligned arrays of long silicon nanowires fabricated using a top–down complementary metal oxide semiconductor (CMOS) compatible approach and their ability for real-time extracellular recording of cellular bioelectricity are presented. The technique enables noninvasive, high-sensitivity, hig...