Laser induced Ni(Ti) silicide formation

Effects of Ti alloying during laser-induced Ni silicide formation is studied. Unique triple layer microstructures were found with the presence of supercell in the NiSi2 grains formed at the interface. This supercell formation was caused b...

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Main Authors: Setiawan, Y., Lee, Pooi See, Pey, Kin Leong, Wang, X. C., Lim, G. C.
Other Authors: School of Materials Science & Engineering
Format: Article
Language:English
Published: 2012
Subjects:
Online Access:https://hdl.handle.net/10356/95000
http://hdl.handle.net/10220/8093
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-950002023-07-14T15:46:35Z Laser induced Ni(Ti) silicide formation Setiawan, Y. Lee, Pooi See Pey, Kin Leong Wang, X. C. Lim, G. C. School of Materials Science & Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials Effects of Ti alloying during laser-induced Ni silicide formation is studied. Unique triple layer microstructures were found with the presence of supercell in the NiSi2 grains formed at the interface. This supercell formation was caused by a local ordering of Ni and Si atoms that favor lower free energy during rapid solidification. Ti rapidly segregates from the alloy melt and forms a protective TiOx overlayer on the surface during solidification. Melt front progressing towards the Ni-rich region leads to quenching of an amorphous layer sandwiched between NiSi2 grains and the TiOx overlayer. Published version 2012-05-17T09:17:02Z 2019-12-06T19:06:12Z 2012-05-17T09:17:02Z 2019-12-06T19:06:12Z 2006 2006 Journal Article Setiawan, Y., Lee, P. S., Pey, K. L., Wang, X. C., & Lim, G. C. (2006). Laser induced Ni(Ti) silicide formation. Applied Physics Letters, 88(11). https://hdl.handle.net/10356/95000 http://hdl.handle.net/10220/8093 10.1063/1.2186073 en Applied physics letters © 2006 American Institute of Physics. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official URL: http://dx.doi.org/10.1063/1.2186073. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. 3 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
spellingShingle DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
Setiawan, Y.
Lee, Pooi See
Pey, Kin Leong
Wang, X. C.
Lim, G. C.
Laser induced Ni(Ti) silicide formation
description Effects of Ti alloying during laser-induced Ni silicide formation is studied. Unique triple layer microstructures were found with the presence of supercell in the NiSi2 grains formed at the interface. This supercell formation was caused by a local ordering of Ni and Si atoms that favor lower free energy during rapid solidification. Ti rapidly segregates from the alloy melt and forms a protective TiOx overlayer on the surface during solidification. Melt front progressing towards the Ni-rich region leads to quenching of an amorphous layer sandwiched between NiSi2 grains and the TiOx overlayer.
author2 School of Materials Science & Engineering
author_facet School of Materials Science & Engineering
Setiawan, Y.
Lee, Pooi See
Pey, Kin Leong
Wang, X. C.
Lim, G. C.
format Article
author Setiawan, Y.
Lee, Pooi See
Pey, Kin Leong
Wang, X. C.
Lim, G. C.
author_sort Setiawan, Y.
title Laser induced Ni(Ti) silicide formation
title_short Laser induced Ni(Ti) silicide formation
title_full Laser induced Ni(Ti) silicide formation
title_fullStr Laser induced Ni(Ti) silicide formation
title_full_unstemmed Laser induced Ni(Ti) silicide formation
title_sort laser induced ni(ti) silicide formation
publishDate 2012
url https://hdl.handle.net/10356/95000
http://hdl.handle.net/10220/8093
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