Laser induced Ni(Ti) silicide formation

• Main Authors: Setiawan, Y., Lee, Pooi See, Pey, Kin Leong, Wang, X. C., Lim, G. C.
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
• Online Access: https://hdl.handle.net/10356/95000; http://hdl.handle.net/10220/8093
• Institution: Nanyang Technological University

Effects of Ti alloying during laser-induced Ni silicide formation is studied. Unique triple layer microstructures were found with the presence of supercell in the NiSi2 grains formed at the interface. This supercell formation was caused b...