Laser-induced Ni(Pt) germanosilicide formation through a self-limiting melting phenomenon on Si1-xGex/Si heterostructure

• Main Authors: Setiawan, Y., Lee, Pooi See, Pey, Kin Leong, Wang, X. C., Lim, G. C., Tan, B. L.
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
• Online Access: https://hdl.handle.net/10356/95001; http://hdl.handle.net/10220/8101
• Institution: Nanyang Technological University

Laser-induced Ni(Pt) germanosilicide formation on Si1−xGex /Si substrate has resulted in the formation of smooth Ni(Pt) germanosilicide/Si interface with minimum interface roughness which is preferred as a contact material. A confined (se...