Non-ablative texturing of silicon surface with a continuous wave fiber laser
Laser surface texturing based on ablation has been widely used, but hardly any reports can be found on non-ablative laser surface texturing. Silicon is highly transparent to the infrared wavelength of fiber laser (λ = 1090 nm) and thus regarded as an unsuitable tool for the purpose of surface textur...
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sg-ntu-dr.10356-951422023-03-04T17:18:27Z Non-ablative texturing of silicon surface with a continuous wave fiber laser Farrokhi, H. Zheng, H. Y. Li, Z. L. Zhou, Wei School of Mechanical and Aerospace Engineering Laser surface texturing based on ablation has been widely used, but hardly any reports can be found on non-ablative laser surface texturing. Silicon is highly transparent to the infrared wavelength of fiber laser (λ = 1090 nm) and thus regarded as an unsuitable tool for the purpose of surface texturing. However, we succeeded in using a continuous wave fiber laser to produce regular arrays of sub-micron bumps on silicon surface. The approach is shown to be based on laser-induced oxidation of silicon. Published version 2013-02-28T07:40:17Z 2019-12-06T19:09:05Z 2013-02-28T07:40:17Z 2019-12-06T19:09:05Z 2012 2012 Journal Article Farrokhi, H., Zhou, W., Zheng, H. Y., & Li, Z. L. (2012). Non-ablative texturing of silicon surface with a continuous wave fiber laser. Optics Express, 20(21), 23180-23185. 1094-4087 https://hdl.handle.net/10356/95142 http://hdl.handle.net/10220/9310 10.1364/OE.20.023180 en Optics express © 2012 Optical Society of America. This paper was published in Optics Express and is made available as an electronic reprint (preprint) with permission of Optical Society of America. The paper can be found at the following official DOI: [http://dx.doi.org/10.1364/OE.20.023180]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. application/pdf |
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Laser surface texturing based on ablation has been widely used, but hardly any reports can be found on non-ablative laser surface texturing. Silicon is highly transparent to the infrared wavelength of fiber laser (λ = 1090 nm) and thus regarded as an unsuitable tool for the purpose of surface texturing. However, we succeeded in using a continuous wave fiber laser to produce regular arrays of sub-micron bumps on silicon surface. The approach is shown to be based on laser-induced oxidation of silicon. |
| author2 |
School of Mechanical and Aerospace Engineering |
| author_facet |
School of Mechanical and Aerospace Engineering Farrokhi, H. Zheng, H. Y. Li, Z. L. Zhou, Wei |
| format |
Article |
| author |
Farrokhi, H. Zheng, H. Y. Li, Z. L. Zhou, Wei |
| spellingShingle |
Farrokhi, H. Zheng, H. Y. Li, Z. L. Zhou, Wei Non-ablative texturing of silicon surface with a continuous wave fiber laser |
| author_sort |
Farrokhi, H. |
| title |
Non-ablative texturing of silicon surface with a continuous wave fiber laser |
| title_short |
Non-ablative texturing of silicon surface with a continuous wave fiber laser |
| title_full |
Non-ablative texturing of silicon surface with a continuous wave fiber laser |
| title_fullStr |
Non-ablative texturing of silicon surface with a continuous wave fiber laser |
| title_full_unstemmed |
Non-ablative texturing of silicon surface with a continuous wave fiber laser |
| title_sort |
non-ablative texturing of silicon surface with a continuous wave fiber laser |
| publishDate |
2013 |
| url |
https://hdl.handle.net/10356/95142 http://hdl.handle.net/10220/9310 |
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1759855212246335488 |