Nano-opto-mechanical actuator driven by gradient optical force
In this letter, a nanoscale opto-mechanical actuator driven by gradient optical force is designed and demonstrated. The nanoscale actuator can achieve a maximum displacement of 67 nm with a response time of 94.5 ns. The optical force is estimated as 1.01 pN/μm/mW in C-band operating wavelengths. The...
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| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/95290 http://hdl.handle.net/10220/9260 |
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| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | In this letter, a nanoscale opto-mechanical actuator driven by gradient optical force is designed and demonstrated. The nanoscale actuator can achieve a maximum displacement of 67 nm with a response time of 94.5 ns. The optical force is estimated as 1.01 pN/μm/mW in C-band operating wavelengths. The device is fabricated on silicon-on-insulator wafer using standard dry etching processes. Compared with traditional microelectromechanical systems actuators driven by electrostatic force, the nanoscale opto-mechanical actuator has the advantages of high resolution of actuation, nanoscale displacement, and fast operating speed. It has potential applications in optical signal processing, chemical, and biological sensing. |
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