Interfacial-layer-free growth of yttrium oxide on germanium by understanding initial surface reactions

• Main Authors: Liu, Z. Q., Chim, W. K., Pan, J. S., Chun, S. R., Liu, Q., Ng, C. M., Chiam, Sing Yang
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/95823; http://hdl.handle.net/10220/11912
• Institution: Nanyang Technological University

In this study, we investigate the surface and interfacial reactions involved in the growth of yttrium oxide through the oxidation of yttrium metal on germanium. Our combined understanding of the oxidation and interfacial reactions allows us to introduce a layer-by-layer method to grow an interfacial...