Adaptive centroid-finding algorithm for freeform surface measurements
Wavefront sensing systems measure the slope or curvature of a surface by calculating the centroid displacement of two focal spot images. Accurately finding the centroid of each focal spot determines the measurement results. This paper studied several widely used centroid-finding techniques and obser...
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| Main Authors: | , , , , |
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| 其他作者: | |
| 格式: | Article |
| 語言: | English |
| 出版: |
2013
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| 在線閱讀: | https://hdl.handle.net/10356/96108 http://hdl.handle.net/10220/10100 |
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| 機構: | Nanyang Technological University |
| 語言: | English |
| 總結: | Wavefront sensing systems measure the slope or curvature of a surface by calculating the centroid displacement of two focal spot images. Accurately finding the centroid of each focal spot determines the measurement results. This paper studied several widely used centroid-finding techniques and observed that thresholding is the most critical factor affecting the centroid-finding accuracy. Since the focal spot image of a freeform surface usually suffers from various types of image degradation, it is difficult and sometimes impossible to set a best threshold value for the whole image. We propose an adaptive centroid-finding algorithm to tackle this problem and have experimentally proven its effectiveness in measuring freeform surfaces. |
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