Phase evolution and room-temperature photoluminescence in amorphous SiC alloy

• Main Authors: Zhou, H. P., Xu, M., Wei, D. Y., Ong, T., Xiao, S. Q., Xu, L. X., Huang, S. Y., Guo, Y. N., Khan, S., Xu, S.
• Other Authors: Institute of Advanced Studies
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Science::Physics
• Online Access: https://hdl.handle.net/10356/97431; http://hdl.handle.net/10220/12054
• Institution: Nanyang Technological University

Amorphous SiC thin films with varying phases and compositions have been synthesized using a low frequency inductively coupled high density plasma source in a hydrogen diluted methane (CH4) and silane (SiH4) mixture. The optical and electrical properties along with the microstructures of the thin fil...