Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching

• Main Authors: Amro, Nabil A., Zhang, Hua, Disawal, Sandeep, Elghanian, Robert, Shile, Roger, Fragala, Joseph
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Materials
• Online Access: https://hdl.handle.net/10356/97512; http://hdl.handle.net/10220/10516
• Institution: Nanyang Technological University

A method, combining micro-contact printing (μCP), wet chemical etching and reactive ion etching (RIE), is reported to fabricate microstructures on Si and SiOx. Positive and negative structures were generated based on different stamps used for μCP. The reproducibility of the obtained microstructures...