Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching

Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching

A method, combining micro-contact printing (μCP), wet chemical etching and reactive ion etching (RIE), is reported to fabricate microstructures on Si and SiOx. Positive and negative structures were generated based on different stamps used for μCP. The reproducibility of the obtained microstructures...

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Main Authors: Amro, Nabil A., Zhang, Hua, Disawal, Sandeep, Elghanian, Robert, Shile, Roger, Fragala, Joseph
Other Authors: School of Materials Science & Engineering
Format: Article
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Materials
Online Access:https://hdl.handle.net/10356/97512
http://hdl.handle.net/10220/10516
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-975122020-06-01T10:13:57Z Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching Amro, Nabil A. Zhang, Hua Disawal, Sandeep Elghanian, Robert Shile, Roger Fragala, Joseph School of Materials Science & Engineering DRNTU::Engineering::Materials A method, combining micro-contact printing (μCP), wet chemical etching and reactive ion etching (RIE), is reported to fabricate microstructures on Si and SiOx. Positive and negative structures were generated based on different stamps used for μCP. The reproducibility of the obtained microstructures shows the methodology reported herein could be useful in Micro-Electro-Mechanical Systems (MEMS), optical and biological sensing applications. 2013-06-21T01:23:09Z 2019-12-06T19:43:27Z 2013-06-21T01:23:09Z 2019-12-06T19:43:27Z 2006 2006 Journal Article Zhang, H., Amro, N. A., Disawal, S., Elghanian, R., Shile, R., & Fragala, J. (2006). Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching. Applied Surface Science, 253(4), 1960-1963. 0169-4332 https://hdl.handle.net/10356/97512 http://hdl.handle.net/10220/10516 10.1016/j.apsusc.2006.03.045 en Applied surface science © 2006 Elsevier B.V.
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Materials
spellingShingle DRNTU::Engineering::Materials
Amro, Nabil A.
Zhang, Hua
Disawal, Sandeep
Elghanian, Robert
Shile, Roger
Fragala, Joseph
Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching
description A method, combining micro-contact printing (μCP), wet chemical etching and reactive ion etching (RIE), is reported to fabricate microstructures on Si and SiOx. Positive and negative structures were generated based on different stamps used for μCP. The reproducibility of the obtained microstructures shows the methodology reported herein could be useful in Micro-Electro-Mechanical Systems (MEMS), optical and biological sensing applications.
author2 School of Materials Science & Engineering
author_facet School of Materials Science & Engineering
Amro, Nabil A.
Zhang, Hua
Disawal, Sandeep
Elghanian, Robert
Shile, Roger
Fragala, Joseph
format Article
author Amro, Nabil A.
Zhang, Hua
Disawal, Sandeep
Elghanian, Robert
Shile, Roger
Fragala, Joseph
author_sort Amro, Nabil A.
title Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching
title_short Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching
title_full Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching
title_fullStr Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching
title_full_unstemmed Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching
title_sort microstructure array on si and siox generated by micro-contact printing, wet chemical etching and reactive ion etching
publishDate 2013
url https://hdl.handle.net/10356/97512
http://hdl.handle.net/10220/10516
_version_ 1681059295270010880

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