Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS
We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ = 10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/mm) and a low and constant effective...
محفوظ في:
| المؤلفون الرئيسيون: | , , |
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| مؤلفون آخرون: | |
| التنسيق: | مقال |
| اللغة: | English |
| منشور في: |
2014
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| الموضوعات: | |
| الوصول للمادة أونلاين: | https://hdl.handle.net/10356/97539 http://hdl.handle.net/10220/19655 |
| الوسوم: |
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| الملخص: | We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ = 10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/mm) and a low and constant effective permittivity (∼1.02) in the frequency range of 0.1–40 GHz. The fabrication process has a low thermal budget, and can be easily integrated with the advanced Cu back-end-of-line CMOS to fabricate low-loss and high quality factor microwave and millimeter wave passives for system-on-chip applications. |
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