Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS

• Main Authors: Tian, Yang, Lee, Kokyan, Wang, Hong
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2014
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
• 在線閱讀: https://hdl.handle.net/10356/97539; http://hdl.handle.net/10220/19655
• 機構: Nanyang Technological University

We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ = 10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/mm) and a low and constant effective...