Electrical properties of textured carbon film formed by pulsed laser annealing

• Main Authors: Xu, Naiyun, Teo, Edwin Hang Tong, Shakerzadeh, Maziar, Wang, Xincai, Ng, Chee Mang, Tay, Beng Kang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/97646; http://hdl.handle.net/10220/13211
• Institution: Nanyang Technological University

Previous works have showed that textured carbon film can be fabricated by applying suitable ion energy and substrate temperature. In this experiment, the effect of laser annealing on amorphous carbon films was studied. Atomic force microscopy shows the effect of laser irradiation on surface morpholo...