Electrical properties of textured carbon film formed by pulsed laser annealing

• المؤلفون الرئيسيون: Xu, Naiyun, Teo, Edwin Hang Tong, Shakerzadeh, Maziar, Wang, Xincai, Ng, Chee Mang, Tay, Beng Kang
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/97646; http://hdl.handle.net/10220/13211

Previous works have showed that textured carbon film can be fabricated by applying suitable ion energy and substrate temperature. In this experiment, the effect of laser annealing on amorphous carbon films was studied. Atomic force microscopy shows the effect of laser irradiation on surface morpholo...