Electrical properties of textured carbon film formed by pulsed laser annealing

• Main Authors: Xu, Naiyun, Teo, Edwin Hang Tong, Shakerzadeh, Maziar, Wang, Xincai, Ng, Chee Mang, Tay, Beng Kang
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2013
• 主題: DRNTU::Engineering::Electrical and electronic engineering
• 在線閱讀: https://hdl.handle.net/10356/97646; http://hdl.handle.net/10220/13211
• 機構: Nanyang Technological University

Previous works have showed that textured carbon film can be fabricated by applying suitable ion energy and substrate temperature. In this experiment, the effect of laser annealing on amorphous carbon films was studied. Atomic force microscopy shows the effect of laser irradiation on surface morpholo...