Effect of initial sp3 content on bonding structure evolution of amorphous carbon upon pulsed laser annealing

• Main Authors: Xu, Naiyun, Tsang, Siu Hon, Teo, Edwin Hang Tong, Wang, Xincai, Ng, Chee Mang, Tay, Beng Kang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/97710; http://hdl.handle.net/10220/13215
• Institution: Nanyang Technological University

Previous work has shown that pulsed laser annealing can be used to change the bonding structure of amorphous carbon films. In this paper, the effect of initial sp3 content on bonding structure of amorphous carbon upon pulsed laser annealing was studied. Visible Raman spectroscopy was used to examine...