Vertical coupling for silicon nitride waveguides using silicon grating couplers and transitions

• Main Authors: Xiao, Zhe, Luan, Feng, Liow, Tsung-Yang, Zhang, Jing, Shum, Perry Ping
• Other Authors: School of Electrical and Electronic Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/97823; http://hdl.handle.net/10220/12116
• Institution: Nanyang Technological University

Fiber to silicon nitride waveguides coupling is achieved using silicon grating coupler with a transition. Two optimized couplers are designed for TE and TM mode excitation, achieving over 55% efficiency. Fabrication issues are also discussed.