Vertical coupling for silicon nitride waveguides using silicon grating couplers and transitions
Fiber to silicon nitride waveguides coupling is achieved using silicon grating coupler with a transition. Two optimized couplers are designed for TE and TM mode excitation, achieving over 55% efficiency. Fabrication issues are also discussed.
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Main Authors: | Xiao, Zhe, Luan, Feng, Liow, Tsung-Yang, Zhang, Jing, Shum, Perry Ping |
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Other Authors: | School of Electrical and Electronic Engineering |
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2013
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/97823 http://hdl.handle.net/10220/12116 |
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Institution: | Nanyang Technological University |
Language: | English |
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